Semiconductor Etch Equipment Market Size, Share, and Trends 2025 to 2034

Semiconductor Etch Equipment Market (By Etching Type: Dry Etching, Wet Etching; By Process Type: Conductor Etch, Dielectric Etch, Silicon Etch; By Wafer Size Compatibility: ≤150 mm, 200 mm, 300 mm, ≥450 mm; By Equipment Type: Batch Etch Systems, Single-Wafer Etch Systems; By Technology Node: ≥65 nm, 45–65 nm, 28–45 nm, 10–28 nm, ≤7 nm; By End-Use Device Type: Logic IC, Memory IC, Analog & Mixed Signal, Power Devices, MEMS, CMOS Image Sensors; By Application: Front-End-of-Line (FEOL), Back-End-of-Line (BEOL), Packaging Etch (e.g., TSV, RDL); By End-User / Fabrication Facility Type: IDMs (Integrated Device Manufacturers), Foundries, OSATs (Outsourced Semiconductor Assembly and Test), Research & Academia / R&D Labs) - Global Industry Analysis, Size, Trends, Leading Companies, Regional Outlook, and Forecast 2025 to 2034

Last Updated : 24 Nov 2025  |  Report Code : 6476  |  Category : Semiconductor and Electronic   |  Format : PDF / PPT / Excel

Chapter 1. Introduction

1.1. Research Objective

1.2. Scope of the Study

1.3. Definition

Chapter 2. Research Methodology

2.1. Research Approach

2.2. Data Sources

2.3. Assumptions & Limitations

Chapter 3. Executive Summary

3.1. Market Snapshot

Chapter 4. Market Variables and Scope 

4.1. Introduction

4.2. Market Classification and Scope

4.3. Industry Value Chain Analysis

4.3.1. Raw Material Procurement Analysis 

4.3.2. Sales and Distribution Channel Analysis

4.3.3. Downstream Buyer Analysis

5.1. Market Dynamics

5.1.1. Market Drivers

5.1.2. Market Restraints

5.1.3. Market Opportunities

5.2. Porter’s Five Forces Analysis

5.2.1. Bargaining power of suppliers

5.2.2. Bargaining power of buyers

5.2.3. Threat of substitute

5.2.4. Threat of new entrants

5.2.5. Degree of competition

Chapter 6. Competitive Landscape

6.1.1. Company Market Share/Positioning Analysis

6.1.2. Key Strategies Adopted by Players

6.1.3. Vendor Landscape

6.1.3.1. List of Suppliers

6.1.3.2. List of Buyers

Chapter 7. Global Semiconductor Etch Equipment Market, By Etching Type

7.1. Semiconductor Etch Equipment Market Revenue and Volume, by Etching Type

7.1.1. Dry Etching

7.1.1.1. Market Revenue and Volume Forecast

7.1.2. Wet Etching

7.1.2.1. Market Revenue and Volume Forecast

Chapter 8. Global Semiconductor Etch Equipment Market, By Process Type

8.1. Semiconductor Etch Equipment Market Revenue and Volume, by Process Type

8.1.1. Conductor Etch

8.1.1.1. Market Revenue and Volume Forecast

8.1.2. Dielectric Etch

8.1.2.1. Market Revenue and Volume Forecast

8.1.3. Silicon Etch

8.1.3.1. Market Revenue and Volume Forecast

Chapter 9. Global Semiconductor Etch Equipment Market, By Wafer Size Compatibility

9.1. Semiconductor Etch Equipment Market Revenue and Volume, by Wafer Size Compatibility

9.1.1. ≤150 mm

9.1.1.1. Market Revenue and Volume Forecast

9.1.2. 200 mm              

9.1.2.1. Market Revenue and Volume Forecast

9.1.3. 300 mm

9.1.3.1. Market Revenue and Volume Forecast

9.1.4. ≥450 mm

9.1.4.1. Market Revenue and Volume Forecast

Chapter 10. Global Semiconductor Etch Equipment Market, By Equipment Type

10.1. Semiconductor Etch Equipment Market Revenue and Volume, by Equipment Type

10.1.1. Batch Etch Systems

10.1.1.1. Market Revenue and Volume Forecast

10.1.2. Single-Wafer Etch Systems

10.1.2.1. Market Revenue and Volume Forecast

Chapter 11. Global Semiconductor Etch Equipment Market, By Technology Node

11.1. Semiconductor Etch Equipment Market Revenue and Volume, by Technology Node

11.1.1. ≥65 nm

11.1.1.1. Market Revenue and Volume Forecast

11.1.2. 45–65 nm

11.1.2.1. Market Revenue and Volume Forecast

11.1.3. 28–45 nm

11.1.3.1. Market Revenue and Volume Forecast

11.1.4. 10–28 nm

11.1.4.1. Market Revenue and Volume Forecast

11.1.5. ≤7 nm

11.1.5.1. Market Revenue and Volume Forecast

Chapter 12. Global Semiconductor Etch Equipment Market, By End-Use Device Type

12.1. Semiconductor Etch Equipment Market Revenue and Volume, by End-Use Device Type

12.1.1. Logic IC

12.1.1.1. Market Revenue and Volume Forecast

12.1.2. Memory IC

12.1.2.1. Market Revenue and Volume Forecast

12.1.3. Analog & Mixed Signal

12.1.3.1. Market Revenue and Volume Forecast

12.1.4. Power Devices

12.1.4.1. Market Revenue and Volume Forecast

12.1.5. MEMS

12.1.5.1. Market Revenue and Volume Forecast

12.1.6. CMOS Image Sensors

12.1.6.1. Market Revenue and Volume Forecast

Chapter 13. Global Semiconductor Etch Equipment Market, By Application

13.1. Semiconductor Etch Equipment Market Revenue and Volume, by Application

13.1.1. Front-End-of-Line (FEOL)

13.1.1.1. Market Revenue and Volume Forecast

13.1.2. Back-End-of-Line (BEOL)

13.1.2.1. Market Revenue and Volume Forecast

13.1.3. Packaging Etch (e.g., TSV, RDL)

13.1.3.1. Market Revenue and Volume Forecast

Chapter 14. Global Semiconductor Etch Equipment Market, By End-User / Fabrication Facility Type

14.1. Semiconductor Etch Equipment Market Revenue and Volume, by End-User / Fabrication Facility Type

14.1.1. IDMs (Integrated Device Manufacturers)

14.1.1.1. Market Revenue and Volume Forecast

14.1.2. Foundries

14.1.2.1. Market Revenue and Volume Forecast

14.1.3. OSATs (Outsourced Semiconductor Assembly and Test)

14.1.3.1. Market Revenue and Volume Forecast

14.1.4. Research & Academia / R&D Labs

14.1.4.1. Market Revenue and Volume Forecast

Chapter 15. Global Semiconductor Etch Equipment Market, Regional Estimates and Trend Forecast

15.1. North America

15.1.1. Market Revenue and Volume Forecast, by Etching Type

15.1.2. Market Revenue and Volume Forecast, by Process Type

15.1.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.1.4. Market Revenue and Volume Forecast, by Equipment Type

15.1.5. Market Revenue and Volume Forecast, by Technology Node

15.1.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.1.7. Market Revenue and Volume Forecast, by Application

15.1.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.1.9. U.S.

15.1.9.1. Market Revenue and Volume Forecast, by Etching Type

15.1.9.2. Market Revenue and Volume Forecast, by Process Type

15.1.9.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.1.9.4. Market Revenue and Volume Forecast, by Equipment Type

15.1.9.5.  Market Revenue and Volume Forecast, by Technology Node

15.1.9.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.1.9.7. Market Revenue and Volume Forecast, by Application

15.1.9.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.1.10. Rest of North America

15.1.10.1. Market Revenue and Volume Forecast, by Etching Type

15.1.10.2. Market Revenue and Volume Forecast, by Process Type

15.1.10.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.1.10.4. Market Revenue and Volume Forecast, by Equipment Type

15.1.10.5. Market Revenue and Volume Forecast, by Technology Node

15.1.10.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.1.10.7. Market Revenue and Volume Forecast, by Application

15.1.10.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.2. Europe

15.2.1. Market Revenue and Volume Forecast, by Etching Type

15.2.2. Market Revenue and Volume Forecast, by Process Type

15.2.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.2.4. Market Revenue and Volume Forecast, by Equipment Type

15.2.5. Market Revenue and Volume Forecast, by Technology Node

15.2.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.2.7. Market Revenue and Volume Forecast, by Application

15.2.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.2.9. UK

15.2.9.1. Market Revenue and Volume Forecast, by Etching Type

15.2.9.2. Market Revenue and Volume Forecast, by Process Type

15.2.9.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.2.9.4. Market Revenue and Volume Forecast, by Equipment Type

15.2.9.5. Market Revenue and Volume Forecast, by Technology Node

15.2.9.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.2.9.7. Market Revenue and Volume Forecast, by Application

15.2.9.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.2.10. Germany

15.2.10.1. Market Revenue and Volume Forecast, by Etching Type

15.2.10.2. Market Revenue and Volume Forecast, by Process Type

15.2.10.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.2.10.4. Market Revenue and Volume Forecast, by Equipment Type

15.2.10.5. Market Revenue and Volume Forecast, by Technology Node 

15.2.10.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.2.10.7. Market Revenue and Volume Forecast, by Application

15.2.10.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.2.11.  France

15.2.11.1. Market Revenue and Volume Forecast, by Etching Type

15.2.11.2. Market Revenue and Volume Forecast, by Process Type

15.2.11.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.2.11.4. Market Revenue and Volume Forecast, by Equipment Type

15.2.11.5. Market Revenue and Volume Forecast, by Technology Node 

15.2.11.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.2.11.7. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.2.11.8. Market Revenue and Volume Forecast, by Application

15.2.12. Rest of Europe

15.2.12.1. Market Revenue and Volume Forecast, by Etching Type

15.2.12.2. Market Revenue and Volume Forecast, by Process Type

15.2.12.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.2.12.4. Market Revenue and Volume Forecast, by Equipment Type

15.2.12.5. Market Revenue and Volume Forecast, by Technology Node 

15.2.12.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.2.12.7. Market Revenue and Volume Forecast, by Application

15.2.12.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.3. APAC

15.3.1. Market Revenue and Volume Forecast, by Etching Type

15.3.2. Market Revenue and Volume Forecast, by Process Type

15.3.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.3.4. Market Revenue and Volume Forecast, by Equipment Type

15.3.5. Market Revenue and Volume Forecast, by Technology Node

15.3.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.3.7. Market Revenue and Volume Forecast, by Application

15.3.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.3.9. India

15.3.9.1. Market Revenue and Volume Forecast, by Etching Type

15.3.9.2. Market Revenue and Volume Forecast, by Process Type

15.3.9.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.3.9.4. Market Revenue and Volume Forecast, by Equipment Type

15.3.9.5. Market Revenue and Volume Forecast, by Technology Node

15.3.9.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.3.9.7. Market Revenue and Volume Forecast, by Application

15.3.9.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.3.10. China

15.3.10.1. Market Revenue and Volume Forecast, by Etching Type

15.3.10.2. Market Revenue and Volume Forecast, by Process Type

15.3.10.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.3.10.4. Market Revenue and Volume Forecast, by Equipment Type

15.3.10.5. Market Revenue and Volume Forecast, by Technology Node 

15.3.10.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.3.10.7. Market Revenue and Volume Forecast, by Application

15.3.10.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.3.11. Japan

15.3.11.1. Market Revenue and Volume Forecast, by Etching Type

15.3.11.2. Market Revenue and Volume Forecast, by Process Type

15.3.11.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.3.11.4. Market Revenue and Volume Forecast, by Equipment Type

15.3.11.5. Market Revenue and Volume Forecast, by Technology Node 

15.3.11.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.3.11.7. Market Revenue and Volume Forecast, by Application

15.3.11.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.3.12. Rest of APAC

15.3.12.1. Market Revenue and Volume Forecast, by Etching Type

15.3.12.2. Market Revenue and Volume Forecast, by Process Type

15.3.12.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.3.12.4. Market Revenue and Volume Forecast, by Equipment Type

15.3.12.5. Market Revenue and Volume Forecast, by Technology Node 

15.3.12.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.3.12.7. Market Revenue and Volume Forecast, by Application

15.3.12.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.4. MEA

15.4.1. Market Revenue and Volume Forecast, by Etching Type

15.4.2. Market Revenue and Volume Forecast, by Process Type

15.4.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.4.4. Market Revenue and Volume Forecast, by Equipment Type

15.4.5. Market Revenue and Volume Forecast, by Technology Node

15.4.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.4.7. Market Revenue and Volume Forecast, by Application

15.4.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.4.9. GCC

15.4.9.1. Market Revenue and Volume Forecast, by Etching Type

15.4.9.2. Market Revenue and Volume Forecast, by Process Type

15.4.9.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.4.9.4. Market Revenue and Volume Forecast, by Equipment Type

15.4.9.5. Market Revenue and Volume Forecast, by Technology Node

15.4.9.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.4.9.7. Market Revenue and Volume Forecast, by Application

15.4.9.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.4.10. North Africa

15.4.10.1. Market Revenue and Volume Forecast, by Etching Type

15.4.10.2. Market Revenue and Volume Forecast, by Process Type

15.4.10.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.4.10.4. Market Revenue and Volume Forecast, by Equipment Type

15.4.10.5. Market Revenue and Volume Forecast, by Technology Node 

15.4.10.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.4.10.7. Market Revenue and Volume Forecast, by Application

15.4.10.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.4.11. South Africa

15.4.11.1. Market Revenue and Volume Forecast, by Etching Type

15.4.11.2. Market Revenue and Volume Forecast, by Process Type

15.4.11.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.4.11.4. Market Revenue and Volume Forecast, by Equipment Type

15.4.11.5. Market Revenue and Volume Forecast, by Technology Node 

15.4.11.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.4.11.7. Market Revenue and Volume Forecast, by Application

15.4.11.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.4.12. Rest of MEA

15.4.12.1. Market Revenue and Volume Forecast, by Etching Type

15.4.12.2. Market Revenue and Volume Forecast, by Process Type

15.4.12.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.4.12.4. Market Revenue and Volume Forecast, by Equipment Type

15.4.12.5. Market Revenue and Volume Forecast, by Technology Node 

15.4.12.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.4.12.7. Market Revenue and Volume Forecast, by Application

15.4.12.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.5. Latin America

15.5.1. Market Revenue and Volume Forecast, by Etching Type

15.5.2. Market Revenue and Volume Forecast, by Process Type

15.5.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.5.4. Market Revenue and Volume Forecast, by Equipment Type

15.5.5. Market Revenue and Volume Forecast, by Technology Node 

15.5.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.5.7. Market Revenue and Volume Forecast, by Application

15.5.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.5.9. Brazil

15.5.9.1. Market Revenue and Volume Forecast, by Etching Type

15.5.9.2. Market Revenue and Volume Forecast, by Process Type

15.5.9.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.5.9.4. Market Revenue and Volume Forecast, by Equipment Type

15.5.9.5. Market Revenue and Volume Forecast, by Technology Node

15.5.9.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.5.9.7. Market Revenue and Volume Forecast, by Application

15.5.9.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

15.5.10.   Rest of LATAM

15.5.10.1. Market Revenue and Volume Forecast, by Etching Type

15.5.10.2. Market Revenue and Volume Forecast, by Process Type

15.5.10.3. Market Revenue and Volume Forecast, by Wafer Size Compatibility

15.5.10.4. Market Revenue and Volume Forecast, by Equipment Type

15.5.10.5. Market Revenue and Volume Forecast, by Technology Node 

15.5.10.6. Market Revenue and Volume Forecast, by End-Use Device Type

15.5.10.7. Market Revenue and Volume Forecast, by Application

15.5.10.8. Market Revenue and Volume Forecast, by End-User / Fabrication Facility Type

Chapter 16. Company Profiles

16.1. Applied Materials, Inc.

16.1.1. Company Overview

16.1.2. Product Offerings

16.1.3. Financial Performance

16.1.4. Recent Initiatives

16.2. Lam Research Corporation

16.2.1. Company Overview

16.2.2. Product Offerings

16.2.3. Financial Performance

16.2.4. Recent Initiatives

16.3. Plasma-Therm

16.3.1. Company Overview

16.3.2. Product Offerings

16.3.3. Financial Performance

16.3.4. Recent Initiatives

16.4. Oxford Instruments

16.4.1. Company Overview

16.4.2. Product Offerings

16.4.3. Financial Performance

16.4.4. Recent Initiatives

16.5. SPTS Technologies (a KLA company)

16.5.1. Company Overview

16.5.2. Product Offerings

16.5.3. Financial Performance

16.5.4. Recent Initiatives

16.6. SAMCO Inc.

16.6.1. Company Overview

16.6.2. Product Offerings

16.6.3. Financial Performance

16.6.4. Recent Initiatives

16.7. Veeco Instruments Inc.

16.7.1. Company Overview

16.7.2. Product Offerings

16.7.3. Financial Performance

16.7.4. Recent Initiatives

16.8. Trion Technology, Inc.

16.8.1. Company Overview

16.8.2. Product Offerings

16.8.3. Financial Performance

16.8.4. Recent Initiatives

16.9. Shibaura Mechatronics Corp.

16.9.1. Company Overview

16.9.2. Product Offerings

16.9.3. Financial Performance

16.9.4. Recent Initiatives

16.10. RION Technology

16.10.1. Company Overview

16.10.2. Product Offerings

16.10.3. Financial Performance

16.10.4. Recent Initiatives

Chapter 17. Research Methodology

16.7. Primary Research

16.7. Secondary Research

16.7. Assumptions

Chapter 18. Appendix

18.1. About Us

18.2. Glossary of Terms

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Frequently Asked Questions

The semiconductor etch equipment market size is expected to increase from USD 30.16 billion in 2025 to USD 56.10 billion by 2034.

The semiconductor etch equipment market is expected to grow at a compound annual growth rate (CAGR) of around 7.14% from 2025 to 2034.

The major players in the semiconductor etch equipment market include Applied Materials, Inc., Lam Research Corporation, Tokyo Electron Limited (TEL), Hitachi High-Tech Corporation, Plasma-Therm, Oxford Instruments, NAURA Technology Group Co.Ltd., ULVAC, Inc., SPTS Technologies, ACM Research, Inc., SAMCO Inc., AMEC, Veeco Instruments Inc., Rudolph Technologies, Trion Technology, Inc. CORIAL, Panasonic Corporation, Shibaura Mechatronics Corp., Mattson Technology Inc., and RION Technology.

The driving factors of the semiconductor etch equipment market are the increased chip production for automotive electronics drives the growth of the semiconductor etch equipment market

Asia Pacific region will lead the global semiconductor etch equipment market during the forecast period 2025 to 2034.

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