Semiconductor Capital Equipment Market Grows with Advancements in Lithography Technology

The global semiconductor capital equipment market size is calculated at USD 116.00 billion in 2025 and is forecasted to reach around USD 210.58 billion by 2034, accelerating at a CAGR of 6.85% from 2025 to 2034. The North America market size surpassed USD 51.02 billion in 2024 and is expanding at a CAGR of 6.96% during the forecast period. The market sizing and forecasts are revenue-based (USD Million/Billion), with 2024 as the base year.

Last Updated : 29 Jul 2025  |  Report Code : 6474  |  Category : Semiconductor and Electronic   |  Format : PDF / PPT / Excel

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  • Last Updated : 29 Jul 2025
  • Report Code : 6474
  • Category : Semiconductor and Electronic

Semiconductor Capital Equipment Market Size and Forecast 2025 to 2034

The global semiconductor capital equipment market size accounted for USD 108.56 billion in 2024 and is predicted to increase from USD 116.00 billion in 2025 to approximately USD 210.58 billion by 2034, expanding at a CAGR of 6.85% from 2025 to 2034. The market growth is attributed to the increasing demand for advanced semiconductor nodes and packaging technologies driven by AI, automotive, and data center applications.

Semiconductor Capital Equipment Market Size 2025 to 2034

Semiconductor Capital Equipment Market Key Takeaways

  • In terms of revenue, the global semiconductor capital equipment market was valued at USD 108.56 billion in 2024.
  • It is projected to reach USD 210.58 billion by 2034.
  • The market is expected to grow at a CAGR of 6.85% from 2025 to 2034.
  • Asia Pacific dominated the global semiconductor capital equipment market with the largest share of 47% in 2024.
  • North America is expected to grow at a notable CAGR from 2025 to 2034.
  • By equipment type, the front-end equipment segment held a major market share in 2024.
  • By equipment type, the lithography sub-segment is projected to grow at a significant CAGR between 2025 and 2034.
  • By application, the foundry operations segment contributed the biggest market share in 2024.
  • By application, the OSAT segment is expected to expand at a significant CAGR between 2025 and 2034.
  • By technology node, the ≥28nm segment led the market in 2024.
  • By technology node, the 3nm and below segment is expected to grow at a significant CAGR over the projected period.
  • By wafer size, the 300mm segment generated the major market share in 2024.
  • By wafer size, the 300 mm and 450 mm segment is expected to grow at a notable CAGR from 2025 to 2034.
  • By end-use industry, the consumer electronics segmwnt held the biggest market share in 2024.
  • By end-use industry, the automotive segment expected to grow at a notable CAGR from 2025 to 2034.
  • By distribution channel, the direct sales segment accounted for the remarkable revenue share in 2024.
  • By distribution channel, the system integrators segment is projected to grow at the highest CAGR between 2025 and 2034.

Impact of Artificial Intelligence on the Semiconductor Capital Equipment Market

The semiconductor capital equipment market is significantly transforming due to advancements in artificial intelligence (AI). AI accelerates manufacturing processes, leading to increased efficiency. Leading equipment manufacturers are now integrating AI-enabled functionalities into essential tools, allowing for real-time defect identification, predictive maintenance, and adaptive process control. These technologies enable chipmakers to reduce cycle times, minimize yield loss, and manage the increasing complexity of advanced nodes. Furthermore, driven by the growing demand for AI chips, equipment vendors are increasingly adopting AI technology to support sub-5nm and heterogeneous integration technologies.

Asia Pacific Semiconductor Capital Equipment Market Size and Growth 2025 to 2034

Asia Pacific semiconductor capital equipment market size was exhibited at USD 51.02 billion in 2024 and is projected to be worth around USD 100.03 billion by 2034, growing at a CAGR of 6.96% from 2025 to 2034.

Asia Pacific Semiconductor Capital Equipment Market Size 2025 to 2034

What Made Asia Pacific the Dominant Region in the Semiconductor Capital Equipment Market in 2024?

Asia Pacific led the semiconductor capital equipment market, capturing the largest revenue share in 2024, due to significant investments made by major foundries and IDMs in Taiwan, South Korea, China, and Japan. According to the SEMI 2024 report, fab equipment spending in Japan reached US$7.0 billion and Southeast Asia’s investments reached US$3.0 billion in 2024, indicating a growing regional focus on expanding semiconductor manufacturing capacity.

The growth of the market in Asia Pacific was largely driven by capacity expansions by TSMC, Samsung Electronics, and SK hynix to boost advanced logic and memory production. The deployment of 3nm and under 5nm node capacity in Taiwan and memory DRAM and NAND equipment upgrades in South Korea significantly contributed to new tool purchases. Additionally, increased government subsidies for localized fab tooling further stimulated the market in this region.(Source: https://www.semi.org)

On May 15, 2025, India approved its sixth semiconductor manufacturing plant, a joint venture between HCL and Foxconn, under the India Semiconductor Mission, with five more facilities in advanced construction stages. India continues to attract foreign investments to bolster semiconductor fab development, ATMP units, and associated infrastructure to scale up domestic chip output. (Source: https://www.india-briefing.com)

Semiconductor Capital Equipment Market Share, By Region, 2024 (%)

North America is expected to grow at the fastest rate in the market during the forecast period, driven by significant developments of foundries and local supply chain localization. The CHIPS and Science Act of 2022, passed by Congress, incentivizes domestic semiconductor production and strengthens applied scientific research in the United States. With strong bipartisan support, the Act authorized and appropriated approximately $280 billion in new spending through FY2027, primarily for semiconductor manufacturing incentives and scientific R&D initiatives.

Major semiconductor manufacturers, including Intel, TSMC, Micron Technology, and Texas Instruments, are developing new fabs in Arizona, Ohio, Idaho, and Texas, respectively. Additionally, the increasing number of collaborative R&D programs between U.S.-based OEMs and university-led consortia to develop sub-3nm process equipment is further driving market growth in the coming years.(Source: https://www.conference-board.org)

Market Overview

The semiconductor capital equipment market comprises the design, manufacturing, and sales of machinery and tools essential for producing semiconductor devices. These include front-end equipment (used for wafer fabrication), back-end equipment (used for packaging and testing), and ancillary systems for cleaning, inspection, and metrology. As semiconductor chips become smaller and more complex, demand for advanced capital equipment, especially for extreme ultraviolet (EUV) lithography, atomic layer deposition, and 3D packaging, continues to rise, driven largely by applications in AI, 5G, automotive electronics, consumer devices, and high-performance computing (HPC).

The rising investments in third-generation semiconductor fabs are significantly contributing to the growing demand for advanced capital equipment worldwide. The rapid advancement in process nodes driven by AI, 5G, and high-performance computing is prompting fabs to adopt advanced toolsets such as EUV lithography, atomic layer deposition (ALD), and high-resolution measurement devices. The highly specialized machines used for wafer processing, testing, assembly, and packaging of integrated circuits are referred to as semiconductor capital equipment.

According to SEMI’s 2024 Year-End Report, the semiconductor capital equipment market has shown remarkable resilience, supported by increasing investments in advanced logic, HBM, and innovative packaging technologies. Wafer fab equipment (WFE) spending experienced a 14% year-over-year increase and an 8% quarter-over-quarter rise in Q4 2024. Additionally, with supply chain resilience gaining importance, the global push for semiconductor sovereignty among governments and industry leaders is expected to lead to a multi-year surge in capital equipment investments. (Source: https://www.semi.org)

Semiconductor Capital Equipment Market Growth Factors

  • Increasing Adoption of Smart Wearables: Rising usage of fitness trackers and smartwatches is driving demand for interactive fitness platforms with real-time biometric integration.
  • Growing Popularity of Gamified Workouts: Enhanced user engagement through gamification is fuelling the adoption of interactive fitness applications across age groups.
  • Expansion of Virtual Coaching Ecosystems: Digital fitness brands are boosting growth by integrating AI-powered personal trainers and immersive coaching environments.
  • Rising Penetration of Connected Home Equipment: The proliferation of smart home gyms and IoT-enabled exercise machines is propelling demand for interactive fitness interfaces.

Market Scope

Report Coverage Details
Market Size by 2034 USD 210.58 Billion
Market Size in 2025 USD 116.00 Billion
Market Size in 2024 USD 108.56 Billion
Market Growth Rate from 2025 to 2034 CAGR of 6.85%
Dominating Region Asia Pacific
Fastest Growing Region North America
Base Year 2024
Forecast Period 2025 to 2034
Segments Covered Equipment Type, Technology Node, Wafer Size, Application, End-Use Industry, Distribution Channel, and Region
Regions Covered North America, Europe, Asia-Pacific, Latin America, and Middle East & Africa

Market Dynamics

Drivers

How Does AI Infrastructure Drive the Demand for Semiconductor Equipment?

The expansion of AI data centers and hyperscale computing is poised to drive the growth of the semiconductor capital equipment market. The focus on developing AI data centers and hyperscale computing is expected to stimulate capital expenditure on advanced semiconductor production. Cloud infrastructure providers and data center operators rely on fast, densely packed chips with high throughput. The production of these processors requires specialized tools for wafer thinning, hybrid bonding, and 3D integration.

The need to increase AI computing capacity across various tools is creating demand across multiple tool categories, including front-end lithography and advanced packaging solutions. The IEEE IRDS 2024 roadmap indicates that AI-specific architectures have led to distinct tool specifications in areas such as wafer-to-wafer alignment and TSV etching. Additionally, increasing initiatives from large organizations and governments are further boosting the market in the coming years.

In September 2024, Applied Materials India Private Limited, a subsidiary of Applied Materials, Inc., a global leader in materials engineering solutions for the semiconductor industry, introduced a new initiative focused on fostering innovation and education within semiconductor equipment. The “Applied Semiconductor Collaboration in Engineering and Technology initiative (ASCENT)” will be an annual event. It will invite researchers from select universities to collaborate with Applied India engineers, with the goal of developing differentiated technologies across various research areas. This initiative is designed to accelerate innovative solutions to the semiconductor equipment industry’s most complex technical challenges. (Source: https://www.appliedmaterials.com)

Restraint

Global Supply Chain Disruptions Restrain Market Expansion

Global supply chain disruptions are anticipated to cause material and component shortages for toolmakers, which hinder the growth of the semiconductor capital equipment market. The supply of essential components has been disrupted by geopolitical tensions, trade bans, and port congestion, leading to delays in tool shipments and extended lead times. These disruptions affect manufacturing efficiency and delay fab expansion timelines, directly impacting revenue cycles and market scalability. Furthermore, the high cost and complexity of next-generation fabrication equipment are expected to limit adoption among smaller foundries, further hampering market growth.

Opportunity

How is Global Fab Construction Projects Accelerating Semiconductor Capital Equipment Demand?

Increasing investment in fab construction projects is expected to boost equipment procurement worldwide, thereby creating significant opportunities in the market. Semiconductor manufacturers are investing heavily in building new fabrication facilities across the U.S., Europe, Taiwan, South Korea, and Japan. Government-backed initiatives, such as the U.S. CHIPS Act and the European Chips Joint Undertaking, aim to bring chip production back to their home countries and reduce geopolitical dependencies in the supply chain. These large-scale construction projects necessitate massive capital equipment installations in both front-end and back-end processes. In 2024, the Semiconductor Industry Association (SIA) announced that more than 20 new fabs are under construction in the U.S. alone, backed by federal and state-level funding. (Source: https://www.semiconductors.org)

  • In 2024, Intel, TSMC, and Samsung Electronics enhanced their U.S. expansion plans, with Intel saying it was making progress on both Ohio and Arizona plants. Furthermore, the Japanese and South Korean equipment suppliers expanded their capacities to supply tools related to these fab builds, boosting the market in the coming years. (Source: https://www.reuters.com)

Equipment Type Insights

Which Equipment Type Dominated the Semiconductor Capital Equipment Market in 2024?

The front-end equipment segment dominated the market in 2024, driven by increased spending on advanced node processes and expanded wafer manufacturing capacity. Top foundries like TSMC, Samsung Electronics, and Intel are focusing on front-end tools, enabling 5nm and 3nm fabrication with tools for etching, deposition, cleaning, and thermal processing. These tools are essential in the initial stages of chip production, requiring precise actions at the atomic level to define circuit patterns and device structures.

SEMI reports that global fab equipment spending for front-end facilities in 2025 is expected to grow by 2% year-over-year (YoY), reaching $110 billion, reflecting continued investment in advanced semiconductor manufacturing. Additionally, major front-end equipment vendors like Applied Materials, Lam Research, and Tokyo Electron have released new platforms, further driving the segment. (Source: https://www.semi.org)

The lithography equipment segment expected to grow at the fastest rate in the coming years, as it is essential for next-generation semiconductor scaling, particularly EUV and High-NA EUV. Chipmakers are focusing on extreme ultraviolet lithography for smaller semiconductor lithography nodes. Additionally, the shift towards AI-optimized chips and 3D architecture is increasing the demand for advanced lithography tools, further boosting the segment.

Application Insights

Which Application Segment Led the Semiconductor Capital Equipment Market in 2024?

The foundry operations segment held the largest revenue share in 2024, driven by increased global demand for contract manufacturing services. Major pure-play foundries made significant investments in front-end wafer production to address the rising needs of fabless customers designing AI, 5G, automotive chips, and HPC node wafers. Moreover, this segment’s dominance stems from the contributions of foundries that have pioneered innovation in chip layout, even without in-house manufacturing.

The outsourced semiconductor assembly and testing (OSAT) segment is expected to grow at the fastest CAGR in the coming years, due to the increasing focus on heterogeneous integration. With the growing complexity of AI processors, edge devices, and HPC platforms, there is a rapid shift from traditional monolithic chip architecture to chiplet structures and 3D stacking. This transition increases the demand for advanced packaging technologies like FOWLP, 2.5D interposers, and 3D TSV. Furthermore, the development of new lithography, metrology, and die-attach equipment optimized for the OSAT environment is accelerating its adoption in both consumer and enterprise applications.

Technology Node Insights

What Made ≥28nm the Dominant Segment in the Semiconductor Capital Equipment Demand in the Semiconductor Capital Equipment Market in 2024?

The ≥28nm segment led the semiconductor capital equipment market in 2024, due to its widespread use in consumer electronics, industrial automation, power management, and the automotive industry. ≥28nm nodes enable the production of microcontrollers, image sensors, analog ICs, and connectivity chips. They prioritize cost efficiency, reliability, and scale over extreme scaling. Their broad application across numerous industries is likely to support the segment’s growth in the coming years.

The 3nm and below segment is expected to grow at the fastest CAGR over the projection period, fueled by the escalating demand for AI, high-performance computing (HPC), and sophisticated mobile applications. These advanced nodes facilitate denser transistor packing, enhancing both energy efficiency and processing speed, which are critical for the upcoming generation of AI accelerators and flagship SoCs. According to IEEE Spectrum, in 2024, TSMC, Samsung Electronics, and Intel expanded their investments in 3nm nodes manufacturing platforms. Moreover, equipment manufacturers’ R&D initiatives, focused on these nodes, further stimulate segmental growth.(Source: https://investor.tsmc.com)

Wafer Size Insights

Why Did the 300mm Segment Dominate the Semiconductor Capital Equipment Market in 2024?

The 300 mm segment dominated the semiconductor capital equipment market, holding the largest revenue share in 2024 due to its high volume, cost-effectiveness, and widespread use in both advanced logic and memory industries. Major chipmakers invested heavily in 300 mm fabs to scale 5nm, 3nm, and DRAM process technologies. Moreover, the 300 mm platform supports high-end packaging and 3D integration techniques, further driving the growth of the segment.

The ≥450 mm segment is expected to grow at the fastest rate during the forecast period, driven by the increasing demands of leading-edge semiconductors and its influence on equipment R&D, aimed at ultra-high-volume manufacturing. The development of 450 mm wafers is progressing within industry consortia and leading companies, focusing on the potential to reduce die costs by utilizing the larger wafer size. Furthermore, the process maturity of 450 mm wafers presents an opportunity to develop new platforms, metrology capabilities, and automated factory systems, thereby boosting segment growth.

End-Use Industry Insights

How Does the Consumer Electronics Segment Dominate the Semiconductor Capital Equipment Market in 2024?

The consumer electronics segment dominated the market in 2024, driven by the high demand for smartphones, laptops, tablets, gaming devices, and smart home gadgets. The utilization of semiconductors has increased significantly in each major OEM product due to the affordable and efficient production of semiconductors from foundries and IDMs, particularly in companies like Apple, Samsung, Sony, and Xiaomi.

SEMI and the Semiconductor Industry Association (SIA) reported that consumer applications experienced substantial growth in all unit weekly shipments of semiconductors in 2024, supporting a long-term trend in investment in wafer processing and packaging tools. Demand for dedicated wafer processing equipment, such as deposition machines, etch machines, and lithography systems, was further boosted by the rise of 5G, OLEDs, and microLED display technologies. Moreover, the need for expensive capital equipment related to high-end precision front-end tools further supports the growth of the segment in the coming years. (Source: https://www.semiconductors.org)

The automotive segment is expected to grow at the fastest CAGR in the coming years, due to the increasing demand for automotive electronics, especially within ADAS, EV power management systems, and in-vehicle computation solutions. This expansion trend positions the automotive industry as a visionary trendsetter in future investments in the market with international foundries focusing on boosting the production of automotive electronics. The rising production of EVs further contributes to segmental growth.

Distribution Channel Insights

What Factors Position Direct Sales as the Leading Distribution Model in the Semiconductor Capital Equipment Market?

The direct sales segment held the largest revenue share in the semiconductor capital equipment market in 2024. Direct sales allow for the handling of complex, customized, and high-value machines that are difficult to sell through indirect channels. This approach enables close collaboration with customers, facilitating tailored installations, process integration, and post-sale support. It also helps in offering specific engineering services, accelerating upgrades, and optimizing equipment performance based on real-time data. Furthermore, direct sales are crucial for managing delivery schedules and ensuring that equipment meets the demands of capacity expansions and advanced technology nodes. 

Equipment vendors like ASML, Applied Materials, Tokyo Electron, and Lam Research had strategic direct sales contacts with customers, allowing them to closely align with fab-specific technology roadmaps. In 2024, the Fab Equipment report by SEMI reported that a high percentage of front-end equipment orders were completed via direct contracts to assist with customized installations, process integration, and post-support. This channel helped OEMs offer specific engineering services, accelerate upgrades, and optimize equipment performance using real-time fab data. Direct sales were also used to manage tight delivery schedules amid global capacity expansions and the need to qualify tools for advanced nodes and heterogeneous integration. These advantages are likely to keep direct sales as the preferred method for developing advanced equipment in high-volume fabs. (Source: https://www.semi.org)

The system integrators segment is expected to grow at the fastest rate in the coming years. This segment growth is fueled by rising market demand from fabless design houses, OSATs, and emerging regional foundries, all of which require comprehensive infrastructure solutions. Automation companies, including Hitachi High-Tech and Advantest, along with general system integrators, are streamlining the coordination of tools, data systems, and cleanroom environments. Moreover, the increasing focus on collaboration with third-party integrators for equipment installation and facility automation is further accelerating the segment’s expansion.

Semiconductor Capital Equipment Market Companies

Semiconductor Capital Equipment Market Companies
  • Advantest Corporation
  • AMEC (Advanced Micro-Fabrication Equipment Inc.)
  • Applied Materials, Inc.
  • ASM International
  • ASML Holding
  • Canon Inc.
  • Cohu, Inc.
  • DISCO Corporation
  • Hitachi High-Tech Corporation
  • KLA Corporation
  • Lam Research Corporation
  • NAURA Technology Group Co., Ltd.
  • Nikon Corporation
  • Nova Measuring Instruments Ltd.
  • Onto Innovation Inc.
  • SCREEN Holdings Co., Ltd.
  • Teradyne, Inc.
  • Tokyo Electron Limited
  • ULVAC, Inc.
  • Veeco Instruments Inc.

Recent Developments

  • In January 2025, Bengaluru-based UHP Technologies is set to inaugurate a 20,000-square-foot semiconductor equipment factory near the international airport. Its subsidiary, KASFAB Tools, has initially invested Rs 20 crore into the Doddaballapur facility. KAS intends to invest another Rs 250 crore within 6–12 months after fulfilling its first customer order and is planning two additional plants in the same region. (Source: https://economictimes.indiatimes.com)
  • In April 2025, Atomera Incorporated, a semiconductor materials and technology licensing firm, announced a strategic marketing alliance with a leading chip fabrication company. The agreement is aimed at driving the adoption of Atomera’s Mears Silicon Technology™ (MST®) across cutting-edge electronics, including AI, 5G, and other next-gen platforms. (Source: https://www.businesswire.com)

Latest Announcement by Industry Leader

  • In June 2025, SurplusGLOBAL, a prominent provider of legacy semiconductor equipment and parts, initiated a major step in its platform transformation. On June 2, the company formally revealed the beta launch of its specialized semiconductor equipment and parts platform, SemiMarket (www.SemiMarket.com). Bruce Kim, CEO of SurplusGLOBAL, stated, "SemiMarket is the realization of the platform business we have dreamed of for the past 25 years," and continued, "Through our AI-based trading system, we aim to revolutionize the extremely inefficient legacy semiconductor parts market and establish a collaborative ecosystem with global customers and partners."(Source: https://www.prnewswire.com)

Segments Covered in the Report

By Equipment Type

  • Front-End Equipment
    • Lithography Equipment
    • Etching Equipment
    • Deposition Equipment (CVD, PVD, ALD)
    • Ion Implantation Systems
    • Oxidation and Diffusion Furnaces
    • Chemical Mechanical Planarization (CMP) Tools
    • Cleaning Equipment
  • Back-End Equipment
    • Dicing Equipment
    • Die Bonders
    • Wire Bonders
    • Flip-Chip Bonders
    • Encapsulation Tools
    • Testing and Inspection Systems
  • Metrology and Inspection Tools
    • Optical Inspection
    • E-Beam Inspection
    • Overlay Measurement
    • CD-SEM

By Application

  • Logic IC Manufacturing
  • Memory (DRAM, NAND) Manufacturing
  • Foundry Operations
  • Integrated Device Manufacturers (IDMs)
  • Outsourced Semiconductor Assembly and Testing (OSAT)

By Technology Node

  • ≥28nm
  • 14nm – 22nm
  • 7nm – 10nm
  • 5nm
  • 3nm and below

By Wafer Size

  • 150 mm
  • 200 mm
  • 300 mm
  • 300 mm and 450 mm
  • ≥450 mm (Emerging R&D)

By End-Use Industry

  • Consumer Electronics
  • Automotive
  • Industrial Automation
  • Telecommunications (5G)
  • Healthcare & Life Sciences
  • Aerospace & Defense
  • Data Centers & HPC

By Distribution Channel

  • Direct Sales
  • System Integrators
  • Distributors/VARs (Value-Added Resellers)

By Region

  • North America
  • Europe
  • Asia Pacific
  • Latin America
  • Middle East & Africa

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Frequently Asked Questions

The semiconductor capital equipment market size is expected to increase from USD 108.56 billion in 2024 to USD 210.58 billion by 2034.

The semiconductor capital equipment market is expected to grow at a compound annual growth rate (CAGR) of around 6.85% from 2025 to 2034.

The major players in the semiconductor capital equipment market include Advantest Corporation, AMEC, Applied Materials, Inc., ASM International, ASML Holding, Canon Inc., Cohu, Inc., DISCO Corporation, Hitachi High-Tech Corporation, KLA Corporation, Lam Research Corporation, NAURA Technology Group Co., Ltd., Nikon Corporation, Nova Measuring Instruments Ltd., Onto Innovation Inc., SCREEN Holdings Co., Ltd., Teradyne, Inc., Tokyo Electron Limited, ULVAC, Inc., and Veeco Instruments Inc.

The driving factors of the semiconductor capital equipment market are the expansion of AI data centers and hyperscale computing is poised to drive the growth of the semiconductor capital equipment market

Asia Pacific region will lead the global semiconductor capital equipment market during the forecast period 2025 to 2034.

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